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134.2
BROOKS AUTOMATION CAREERSSEARCH JOBSCULTUREBENEFITSDIVERSITY / HUMAN RIGHTSUNIVERSITY RELATIONS About Brooks At Brooks, new ideas, new technologies and new ways of thinking are driving our future. Our customer focused culture encourages employees to embrace innovation and challenge the status quo with novel MAGNATRAN® 7 LEAPFROG® VACUUM ROBOT Dual Arm, Same Side Wafer Transfer Robot for Highest Throughput Applications in Vacuum Cluster Tools The MagnaTran® 7 Leapfrog® robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications. RFID SMART TAG 8200 AND 8400 FAMILY Smart Tag Infrared 8200 & 8400 Family combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and 8200 COMPRESSOR INSTALLATION, OPERATION AND SERVICE 8200 Compressor Installation, Operation and Service Manual Brooks Automation 8040353 Revision AA Information provided within thisdocument is
SAFETY DATA SHEET
Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drvie Fax (978) 262-2500 Chelmsford, MA www.brooks.com 825086-00 (Rev C) 21-Apr-16 Page 1 of 10 MATERIAL SAFETY DATA SHEET Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drive Fax (978) 262-2500 Chelmsford, MA 01824 www.brooks.com BROOKS-CRYOGENICS ON-BOARD IS CRYOPUMP INSTALLATION MANUAL On-Board IS Cryopump Tables Installation Instructions Brooks Automation 8040596 Revision A v Tables Table Title Page 1-1 On-Board IS 8F Cryopump Specifications (Part Number 8185038 with ChevronArray)1-6
BROOKS | SIAR SUBMISSION Brooks | SIAR Submission. Enter the Required Information Below. Brooks Supplier Name: Note: If you do not know your Brooks Supplier Name or Number, please contact your Brooks Buyer. Brooks Supplier Number: Captcha: Enter the above text: *All fields are required. SUBMITTING A SIAR VIA WEB-BASED FORM WORK INSTRUCTIONS Submitting a SIAR via Web-Based Form Work Instructions.docx 4. Select the appropriate Brooks Location this SIAR pertains to 5. Select the Brooks Buyer you are working with; who should be notified of this incoming request 6. Select the type of SIAR from the Change Class list of values 7. Select Yes if this SIAR has an IMMEDIATE impact to the shipment, otherwise leave set to No ATR60LF READER| BROOKS ATR60LF Reader. The new Brooks ATR60LF RFID Reader is the consolidated reader of the ATR9100/9180 and LF60C SoliD reader. With its wide range of technical features and favorable prices, the ATR60LF Reader combines cost efficiency and high performance. The ATR60LF Reader communicates with passive TIRIS™ transponders on an LF frequency of134.2
BROOKS AUTOMATION CAREERSSEARCH JOBSCULTUREBENEFITSDIVERSITY / HUMAN RIGHTSUNIVERSITY RELATIONS About Brooks At Brooks, new ideas, new technologies and new ways of thinking are driving our future. Our customer focused culture encourages employees to embrace innovation and challenge the status quo with novel MAGNATRAN® 7 LEAPFROG® VACUUM ROBOT Dual Arm, Same Side Wafer Transfer Robot for Highest Throughput Applications in Vacuum Cluster Tools The MagnaTran® 7 Leapfrog® robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications. RFID SMART TAG 8200 AND 8400 FAMILY Smart Tag Infrared 8200 & 8400 Family combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and 8200 COMPRESSOR INSTALLATION, OPERATION AND SERVICE 8200 Compressor Installation, Operation and Service Manual Brooks Automation 8040353 Revision AA Information provided within thisdocument is
SAFETY DATA SHEET
Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drvie Fax (978) 262-2500 Chelmsford, MA www.brooks.com 825086-00 (Rev C) 21-Apr-16 Page 1 of 10 MATERIAL SAFETY DATA SHEET Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drive Fax (978) 262-2500 Chelmsford, MA 01824 www.brooks.com BROOKS-CRYOGENICS ON-BOARD IS CRYOPUMP INSTALLATION MANUAL On-Board IS Cryopump Tables Installation Instructions Brooks Automation 8040596 Revision A v Tables Table Title Page 1-1 On-Board IS 8F Cryopump Specifications (Part Number 8185038 with ChevronArray)1-6
BROOKS | SIAR SUBMISSION Brooks | SIAR Submission. Enter the Required Information Below. Brooks Supplier Name: Note: If you do not know your Brooks Supplier Name or Number, please contact your Brooks Buyer. Brooks Supplier Number: Captcha: Enter the above text: *All fields are required. SUBMITTING A SIAR VIA WEB-BASED FORM WORK INSTRUCTIONS Submitting a SIAR via Web-Based Form Work Instructions.docx 4. Select the appropriate Brooks Location this SIAR pertains to 5. Select the Brooks Buyer you are working with; who should be notified of this incoming request 6. Select the type of SIAR from the Change Class list of values 7. Select Yes if this SIAR has an IMMEDIATE impact to the shipment, otherwise leave set to No BROOKS UNIVERSITY EDUCATION Brooks University. Through the Brooks University, we offer a wide range of training courses featuring certified instructors, flexible curriculum, and a focus on hands-on learning. All of our training offerings are designed to help customers get the most from their Brooks investment. Semiconductor Training. Safety and OperationTraining Courses.
MAGNATRAN® 7 SCARA VACUUM ROBOT The MagnaTran® 7 SCARA robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million. The simple design has a minimum of moving parts. Its direct magnetic drive has no dynamic vacuum seals thus reducing friction and wear, resulting infewer failures.
RELIANCE™ ATR™8 ATMOSPHERIC ROBOT REPAIR Reliance™ ATR™8 Atmospheric Robot Repair. The Reliance™ ATR™8 robot provides the lowest cost of ownership and highest productivity for semiconductor material handling applications. The Reliance ATR8 is a high-performance atmospheric robot utilizing a compact, direct drive assembly and detached based control electronics.RAZOR - BROOKS
Razor™ Atmospheric Robotics Brooks Automation’s Razor™ family of high-performance atmospheric robots, aligners, and tracks providessuperior
MATERIAL SAFETY DATA SHEET Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drive Fax (978) 262-2500 Chelmsford, MA 01824 www.brooks.comSAFETY DATA SHEET
Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drvie Fax (978) 262-2500 Chelmsford, MA www.brooks.com 825086-00 (Rev C) 21-Apr-16 Page 1 of 10 BROOKS-CRYOGENICS ON-BOARD IS CRYOPUMP INSTALLATION MANUAL On-Board IS Cryopump Tables Installation Instructions Brooks Automation 8040596 Revision A v Tables Table Title Page 1-1 On-Board IS 8F Cryopump Specifications (Part Number 8185038 with ChevronArray)1-6
BROOKS SPRINT 6™
A contemporary scheduling software application designed specifi cally to meet the needs of high-throughput screening groups, Sprint 6 is applicable to any application requiring ON-BOARD IS 1000 COMPRESSOR INSTALLATION, OPERATION AND On-Board IS 1000 Compressor Installation, Operation and Maintenance Manual Brooks Automation 8040597 Revision A Information provided within this document is subject to change without notice, and althoughbelieved to be
SUBMITTING A SIAR VIA WEB-BASED FORM WORK INSTRUCTIONS Submitting a SIAR via Web-Based Form Work Instructions.docx 4. Select the appropriate Brooks Location this SIAR pertains to 5. Select the Brooks Buyer you are working with; who should be notified of this incoming request 6. Select the type of SIAR from the Change Class list of values 7. Select Yes if this SIAR has an IMMEDIATE impact to the shipment, otherwise leave set to No BROOKS AUTOMATION CAREERSSEARCH JOBSCULTUREBENEFITSDIVERSITY / HUMAN RIGHTSUNIVERSITY RELATIONS About Brooks At Brooks, new ideas, new technologies and new ways of thinking are driving our future. Our customer focused culture encourages employees to embrace innovation and challenge the status quo with novel ATR60LF READER| BROOKS ATR60LF Reader. The new Brooks ATR60LF RFID Reader is the consolidated reader of the ATR9100/9180 and LF60C SoliD reader. With its wide range of technical features and favorable prices, the ATR60LF Reader combines cost efficiency and high performance. The ATR60LF Reader communicates with passive TIRIS™ transponders on an LF frequency of134.2
MAGNATRAN® 7 LEAPFROG® VACUUM ROBOT Dual Arm, Same Side Wafer Transfer Robot for Highest Throughput Applications in Vacuum Cluster Tools The MagnaTran® 7 Leapfrog® robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications. MAGNATRAN® 7 SCARA VACUUM ROBOT The MagnaTran® 7 SCARA robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million. The simple design has a minimum of moving parts. Its direct magnetic drive has no dynamic vacuum seals thus reducing friction and wear, resulting infewer failures.
RFID SMART TAG 8200 AND 8400 FAMILY Smart Tag Infrared 8200 & 8400 Family combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, andSAFETY DATA SHEET
Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drvie Fax (978) 262-2500 Chelmsford, MA www.brooks.com 825086-00 (Rev C) 21-Apr-16 Page 1 of 10 MATERIAL SAFETY DATA SHEET Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drive Fax (978) 262-2500 Chelmsford, MA 01824 www.brooks.com BROOKS-CRYOGENICS ON-BOARD IS CRYOPUMP INSTALLATION MANUAL On-Board IS Cryopump Tables Installation Instructions Brooks Automation 8040596 Revision A v Tables Table Title Page 1-1 On-Board IS 8F Cryopump Specifications (Part Number 8185038 with ChevronArray)1-6
BROOKS | SIAR SUBMISSION Brooks | SIAR Submission. Enter the Required Information Below. Brooks Supplier Name: Note: If you do not know your Brooks Supplier Name or Number, please contact your Brooks Buyer. Brooks Supplier Number: Captcha: Enter the above text: *All fields are required. AUTOMATION, VACUUM & INSTRUMENTATION FOR SEMICONDUCTOR The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. BROOKS AUTOMATION CAREERSSEARCH JOBSCULTUREBENEFITSDIVERSITY / HUMAN RIGHTSUNIVERSITY RELATIONS About Brooks At Brooks, new ideas, new technologies and new ways of thinking are driving our future. Our customer focused culture encourages employees to embrace innovation and challenge the status quo with novel ATR60LF READER| BROOKS ATR60LF Reader. The new Brooks ATR60LF RFID Reader is the consolidated reader of the ATR9100/9180 and LF60C SoliD reader. With its wide range of technical features and favorable prices, the ATR60LF Reader combines cost efficiency and high performance. The ATR60LF Reader communicates with passive TIRIS™ transponders on an LF frequency of134.2
MAGNATRAN® 7 LEAPFROG® VACUUM ROBOT Dual Arm, Same Side Wafer Transfer Robot for Highest Throughput Applications in Vacuum Cluster Tools The MagnaTran® 7 Leapfrog® robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications. MAGNATRAN® 7 SCARA VACUUM ROBOT The MagnaTran® 7 SCARA robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million. The simple design has a minimum of moving parts. Its direct magnetic drive has no dynamic vacuum seals thus reducing friction and wear, resulting infewer failures.
RFID SMART TAG 8200 AND 8400 FAMILY Smart Tag Infrared 8200 & 8400 Family combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, andSAFETY DATA SHEET
Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drvie Fax (978) 262-2500 Chelmsford, MA www.brooks.com 825086-00 (Rev C) 21-Apr-16 Page 1 of 10 MATERIAL SAFETY DATA SHEET Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drive Fax (978) 262-2500 Chelmsford, MA 01824 www.brooks.com BROOKS-CRYOGENICS ON-BOARD IS CRYOPUMP INSTALLATION MANUAL On-Board IS Cryopump Tables Installation Instructions Brooks Automation 8040596 Revision A v Tables Table Title Page 1-1 On-Board IS 8F Cryopump Specifications (Part Number 8185038 with ChevronArray)1-6
BROOKS | SIAR SUBMISSION Brooks | SIAR Submission. Enter the Required Information Below. Brooks Supplier Name: Note: If you do not know your Brooks Supplier Name or Number, please contact your Brooks Buyer. Brooks Supplier Number: Captcha: Enter the above text: *All fields are required. AUTOMATION, VACUUM & INSTRUMENTATION FOR SEMICONDUCTOR The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. BROOKS UNIVERSITY EDUCATION Brooks University. Through the Brooks University, we offer a wide range of training courses featuring certified instructors, flexible curriculum, and a focus on hands-on learning. All of our training offerings are designed to help customers get the most from their Brooks investment. Semiconductor Training. Safety and OperationTraining Courses.
MAGNATRAN® 7 SCARA VACUUM ROBOT The MagnaTran® 7 SCARA robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million. The simple design has a minimum of moving parts. Its direct magnetic drive has no dynamic vacuum seals thus reducing friction and wear, resulting infewer failures.
RELIANCE™ ATR™8 ATMOSPHERIC ROBOT REPAIR Reliance™ ATR™8 Atmospheric Robot Repair. The Reliance™ ATR™8 robot provides the lowest cost of ownership and highest productivity for semiconductor material handling applications. The Reliance ATR8 is a high-performance atmospheric robot utilizing a compact, direct drive assembly and detached based control electronics. LOCATIONS | BROOKS CAREERS "I am grateful to be a part of such a wonderful company that strives to make the world a better place. My main career goal was to positively contribute to the world around me and, by working at GENEWIZ, I have the chance to make a difference in the field of science and technology. MATERIAL SAFETY DATA SHEET Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drive Fax (978) 262-2500 Chelmsford, MA 01824 www.brooks.comSAFETY DATA SHEET
Brooks Automation, Inc. Tel (978) 262-2400 15 Elizabeth Drvie Fax (978) 262-2500 Chelmsford, MA www.brooks.com 825086-00 (Rev C) 21-Apr-16 Page 1 of 10BROOKS SPRINT 6™
A contemporary scheduling software application designed specifi cally to meet the needs of high-throughput screening groups, Sprint 6 is applicable to any application requiringMGB096-1-2-LG-L
7.52mm BOTTOM 8.00mm TOP SPECIFICATIONS DOCUMENT MGB096-1-2-LG-L Details: 96 Well Glass Bottom Microplate | 0.17mm | Low Glass 630µl | Black Plastic Upper | Standard Height Clear Lid BROOKS-CRYOGENICS ON-BOARD IS CRYOPUMP INSTALLATION MANUAL On-Board IS Cryopump Tables Installation Instructions Brooks Automation 8040596 Revision A v Tables Table Title Page 1-1 On-Board IS 8F Cryopump Specifications (Part Number 8185038 with ChevronArray)1-6
SUBMITTING A SIAR VIA WEB-BASED FORM WORK INSTRUCTIONS Submitting a SIAR via Web-Based Form Work Instructions.docx 4. Select the appropriate Brooks Location this SIAR pertains to 5. Select the Brooks Buyer you are working with; who should be notified of this incoming request 6. Select the type of SIAR from the Change Class list of values 7. Select Yes if this SIAR has an IMMEDIATE impact to the shipment, otherwise leave set to No* Feedback
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Featured Product
Spartan™ 300mm 4 I/O Sorter*
* Wafer Handling Robotics* Vacuum Robots
* MagnaTran® 7 BiSymmetrik™ MagnaTran® 7 BiSymmetrik™ The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million. * MagnaTran® 7 Frogleg™ MagnaTran® 7 Frogleg™ The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million. * MagnaTran® 7 Leapfrog® MagnaTran® 7 Leapfrog® The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications. * MagnaTran® 7 SCARAMagnaTran® 7 SCARA
The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million. * MagnaTran® 8 QuadraFly MagnaTran® 8 QuadraFly The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter. * MagnaTran® 8 Radius™ MagnaTran® 8 Radius™ The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.*
* Wafer Handling Systems* Vacuum Systems
* VCE Load Locks
Vacuum Cassette Elevator (VCE) Load Locks Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafercassettes.
* Marathon™ 2 Transport System Marathon 2 Transport System Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements. * Marathon™ Express Marathon Express Vacuum Transport System The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications. * Atmospheric Systems * Jet™ Atmospheric Transport System Jet Atmospheric Transport System Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. * RFID & IR Asset Tracking*
* Factory Automation Solutions* Spartan Sorters
Spartan Sorters
This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.* Load Ports
* IsoPort™ 300 Load Port IsoPort 300 Load Port Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers. * Vision™ 300 Load Port Vision 300 Load Port The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration. * Certon™ 450 Load Port Certon™ 450 Load Port The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards.* Reticle Handling
* M2 Reticle ChangersM2 Reticle Changers
The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.). * Narrow Reticle Indexer Narrow Reticle Indexer Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.* SMIF Solutions
* SMIF Load Port Transfer (LPT) SMIF Load Port Transfer (LPT) Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.* SMIF-INX Indexers
SMIF-INX Indexers
Designed to supply wafer indexing for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafer handlers. * VersaPort™ 2200 Load Port VersaPort 2200 Load Port The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing. * Semiconductor Contamination ControlFeatured Product
M800 Fully-Automatic300mm FOUP Cleaner*
* Cleaning Equipment* FOUP/Pod Cleaners
* M800 300mm FOUP Cleaner M800 300mm FOUP Cleaner The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at thehighest throughput.
* M330 Fully-Automatic FOUP Cleaner M330 FOUP Fully-Automatic Cleaner The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency. * M600 Automatic Pod Cleaner M600 Automatic Pod Cleaner The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned. * M300 Semi-Automatic FOUP/Pod Cleaner M300 Semi-Automatic FOUP/Pod Cleaner The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and dryingresults.
* EUV Pod Cleaner
* M1000 EUV Pod CleanerEUV Pod Cleaner
The M1000 fully-automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.*
* Clean Storage
* Reticle Stockers
* M1500 Semi-Automatic M1500 Semi-Automatic Reticle Box Stocker The Brooks semi-automatic M1500 reticle box stocker stores up to 1,500 reticles in its cases. The reticle box ID is identified and the data file is logged in the database. * M1900 Reticle Stockers M1900 Reticle Stockers Four variations of M1900 Reticle Stockers: Fully-Automatic Semi-Bare, Fully-Automatic RSP150, Fully-Automatic EUV POD Stocker,Semi-Automatic.
* Reticle Storage
Reticle Storage
* RPS-C Automated Storage and Management System for SMIF Pods RPS-C Automated Storage and Management System for SMIF Pods The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with optional xCDA or N2purge.
* RS Bare Reticle Stocker Family RS Bare Reticle Stocker Family The RS family provides a fully automated reticle management system that combines a sorter with a stocker capacity up to 2900 reticles. * RS-C Reticle Storage and Inspection System RS-C Reticle Storage and Inspection System The RS-C is a fully automated, highly flexible standalone storage and inspection system for 6". * RX Reticle Stocker and Carrier Buffer RX Reticle Stocker and Carrier Buffer The RX family is an innovative combination of reticle stocker and carrier buffer for managing the reticles throughout the fab. * RXi Reticle Inspection, Sorting and Storage Platform RXi Reticle Inspection, Sorting and Storage Platform The RXi is a fully automated standalone inspection system for 6”.*
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* M2 Reticle ChangersM2 Reticle Changers
The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.). * Narrow Reticle Indexer Narrow Reticle Indexer Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.* Life Sciences
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